Keywords: Meetings, students paper awards
Advanced
Equipment Control/Advanced Process Control (AEC/APC) SYMPOSIUM XXI
September
27-30, 2009
Student Competition
For the 10th
year, the AEC/APC Symposium is conducting a competition for student papers. Students
from all over the world are invited to participate. The winners will receive an
expense-paid trip to the symposium to present their papers.
Call for Papers
The symposium will be built
around sessions such as (but not limited to) the following topics:
Factory-wide and
enterprise-wide applications and • deployment
Sensor development,
implementation, and • integration
Sensor/actuator bus and
intelligent sensors •
Integrated metrology and
virtual metrology •
Advanced process control (APC)
integration • with yield management and design for
manufacturability (DFM)
Real-time data collection and
data management •
Control architecture
requirements •
Merging APC with other
capabilities such as real-• time systems, yield, maintenance management, and adaptive
scheduling; merging of data associated with these applications
Applications (etch, litho,
CVD, PVD, implant) •
Fault detection and
classification (FDC); fault • prediction (FP)
Future APC needs and
requirements •
Run-to-run, wafer-to-wafer,
and real-time control; • process modeling and model-based control
Benefits and justification
(return on investment, • cost of ownership, overall equipment effectiveness
Standards (process control
systems, sensorbus, • data quality, integrated metrology, EDA, time synchronization)
Tool productivity data
collection/analysis •
e-diagnostics,
e-manufacturing, and equipment • engineering capability (EEC)
APC in the next generation
factory (NGF) •
APC and APC-related
advancements in solar, LCD • and memory devices industries
APC
applications to back-end semiconductor • manufacturing
Student Competition
Guidelines
Applicants must be students who
are matriculated in a university or college degree program. A letter or email
of support from the student’s faculty advisor should accompany each
entered paper.
Only full papers will be considered.
Papers are to be limited to four pages, including a one-paragraph abstract.
Abstracts must be submitted
electronically using the template provided atwww.aecapcsymposium.org
A panel of industry and
university representatives will evaluate the papers. Our target is to accept
three to five papers, although the number accepted will depend upon the quality
of the submissions.
Abstracts, presentations,
papers, posters, and any other material must be non-confidential. Do not submit
proprietary information in any materials.
Provide contact information for the
author:
• Full name
• College/University
• E-mail
• Phone number
• Fax number
• Mailing address
The International SEMATECH
Manufacturing Initiative (ISMI) is solely responsible for accepting or
rejecting any submissions.
Due dates
May 22, 2009 Submission Deadline
June 19, 2009 Acceptance Notification
August 14, 2009 Final Presentation
Due
August 21, 2009 Presentation
Reformatting Due
Professors and other industry professionals (non-students) who wish to
submit abstracts should visit www.aecapcsymposium.org for further information.
S. Joe Qin, Fluor Professor of Process
Engineering
The Mork Family Department of Chemical Engineering and Materials Science
Ming Hsieh Department of Electrical Engineering
Daniel J. Epstein Department of Industrial and Systems Engineering
925 Bloom Walk, HED 211,